EPJ Web of Conferences 6, 06001 (2010)
https://doi.org/10.1051/epjconf/20100606001
https://doi.org/10.1051/epjconf/20100606001
Temperature effects on the mechanical reliability of MEMS structures: experimental study on creep and thermal fatigue
Mechanical Department, Politecnico di Torino,
Corso Duca degli Abruzzi
24, 10129
Torino (Italy)
E-mail: giorgio.depasquale@polito.it, eugenio.brusa@polito.it,
aurelio.soma@polito.it
This article has no abstract.
© Owned by the authors, published by EDP Sciences, 2010
