X-ray strain analysis in thin films enhanced by 2D detection
Institut P’ CNRS - Université de Poitiers - ENSMA,
2 LPMTM, UPR9001 CNRS, Université Paris13, 93430 Villetaneuse, France
3 PIMM, ENSAM, 151 Bd de l'Hopital, 75013 Paris, France
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Performing a complete in-situ strain measurement of polycrystalline thin films using X-ray diffraction is time consuming with most standard diffraction beamlines at synchrotron facilities and not realistic with laboratory diffractometers. Two dimensional detection is shown to enable relatively fast and reliable X-ray strain measurements during continuous in-situ tensile testing of metallic films deposited on polyimide substrates. We show in this paper the advantages to perform this kind of measurements as compared to those with punctual detection.
© Owned by the authors, published by EDP Sciences, 2010