Ion implantation of CdTe single crystals
1 Physics Chair, Rzeszow University of Technology, al. Powstańców Warszawy 12, 35-959 Rzeszow, Poland
2 Department of Fundamental Technologies, Ivan Franko Drogobych State Pedagogical University, Ivan Franko 24, 82100 Drogobych, Ukraine
3 Biophysics Chair, Rzeszow University, S. Pigonia 1, 35-959 Rzeszow, Poland
Published online: 15 December 2016
Ion implantation is a technique which is widely used in industry for unique modification of metal surface for medical applications. In semiconductor silicon technology ion implantation is also widely used for thin layer electronic or optoelectronic devices production. For other semiconductor materials this technique is still at an early stage. In this paper based on literature data we present the main features of the implantation of CdTe single crystals as well as some of the major problems which are likely to occur when dealing with them. The most unexpected feature is the high resistance of these crystals against the amorphization caused by ion implantation even at high doses (1017 1/cm2). The second property is the disposal of defects much deeper in the sample then it follows from the modeling calculations. The outline of principles of the ion implantation is included in the paper. The data based on RBS measurements and modeling results obtained by using SRIM software were taken into account.
© The Authors, published by EDP Sciences, 2017
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