EPJ Web of Conferences 149, 01010 (2017)
https://doi.org/10.1051/epjconf/201714901010
https://doi.org/10.1051/epjconf/201714901010
CVD diamond with boron-doped delta-layers deposited by microwave plasma
1 Institute of Applied Physics of the Russian Academy of Sciences, Nizhny Novgorod, Russia
2 Institute for Physics of Microstructures of the Russian Academy of Sciences, Nizhny Novgorod, Russia
Published online: 4 August 2017
This article has no abstract.
© The Authors, published by EDP Sciences, 2017
This is an Open Access article distributed under the terms of the Creative Commons Attribution License 4.0, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
