CVD diamond with boron-doped delta-layers deposited by microwave plasma

A.L. Vikharev; A.M. Gorbachev; M.A. Lobaev; D.B. Radishev; V.A. Isaev; S.A. Bogdanov; M.N. Drozdov; E.V. Demidov; E.A. Surovegina; V.I. Shashkin; P.A. Yunin; J.E. Butler

doi:10.1051/epjconf/201714901010

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EPJ Web of Conferences 149, 01010 (2017)
https://doi.org/10.1051/epjconf/201714901010

CVD diamond with boron-doped delta-layers deposited by microwave plasma

A.L. Vikharev¹, A.M. Gorbachev¹, M.A. Lobaev¹, D.B. Radishev¹, V.A. Isaev¹, S.A. Bogdanov¹, M.N. Drozdov², E.V. Demidov², E.A. Surovegina², V.I. Shashkin², P.A. Yunin² and J.E. Butler¹

¹ Institute of Applied Physics of the Russian Academy of Sciences, Nizhny Novgorod, Russia
² Institute for Physics of Microstructures of the Russian Academy of Sciences, Nizhny Novgorod, Russia

Published online: 4 August 2017

This article has no abstract.

© The Authors, published by EDP Sciences, 2017

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