Express in-situ measurement of single crystal diamond growth/etching rate in microwave plasma: how to perform multiparametric kinetics study in one working day
1 General Physics Institute RAS, Moscow, Russia
2 National Research Nuclear University MEPhI, Moscow, Russia
3 Harbin Institute of Technology, Harbin, P.R. China
4 Institute of Radio Engineering and Electronics RAS, Fryazino, Russia
Published online: 4 August 2017
This article has no abstract.
© The Authors, published by EDP Sciences, 2017
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