Investigation of the properties of a 3-level broadband antireflective structure on silicon by THz time-domain spectroscopy
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2 Samara University, 34, Moskovskoe shosse, Samara, 443086, Russian Federation
3 Image Processing Systems Institute of the Russian Academy of Sciences, 151, Molodogvardejskaya st., Samara, 443001, Russian Federation
Published online: 23 November 2018
This article has no abstract.
© The Authors, published by EDP Sciences, 2018
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