https://doi.org/10.1051/epjconf/201920502004
Broadband extreme ultraviolet interferometry and imaging
1 Advanced Research Center for Nanolithography, Science Park 110, 1098 XG Amsterdam, The Netherlands
2 Department of Physics and Astronomy, and Laserlab, Vrije Universiteit, De Boelelaan 1081 HV Amsterdam, The Netherlands
* Corresponding author: s.witte@arcnl.nl
Published online: 16 April 2019
Using a pair of phase-locked high-harmonic generation sources, we demonstrate Fourier transform interferometry at extreme-ultraviolet (EUV) wavelengths between 17 and 55 nm. This is made possible by the adaptation of a birefringence-based ultrastable interferometer for infrared femtosecond pulses. Since we measure the interference with an EUV-sensitive CCD camera, this enables a wide range of spatially and spectrally resolved measurements at extreme ultraviolet wavelengths. We demonstrate the capabilities of this technique by performing wavelength-resolved high-resolution coherent diffractive imaging and by measuring the spatially resolved spectral absorption of a thin structured titanium film.
© The Authors, published by EDP Sciences, 2019
This is an Open Access article distributed under the terms of the Creative Commons Attribution License 4.0, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
