Broadband extreme ultraviolet interferometry and imaging
1 Advanced Research Center for Nanolithography, Science Park 110, 1098 XG Amsterdam, The Netherlands
2 Department of Physics and Astronomy, and Laserlab, Vrije Universiteit, De Boelelaan 1081 HV Amsterdam, The Netherlands
* Corresponding author: firstname.lastname@example.org
Published online: 16 April 2019
Using a pair of phase-locked high-harmonic generation sources, we demonstrate Fourier transform interferometry at extreme-ultraviolet (EUV) wavelengths between 17 and 55 nm. This is made possible by the adaptation of a birefringence-based ultrastable interferometer for infrared femtosecond pulses. Since we measure the interference with an EUV-sensitive CCD camera, this enables a wide range of spatially and spectrally resolved measurements at extreme ultraviolet wavelengths. We demonstrate the capabilities of this technique by performing wavelength-resolved high-resolution coherent diffractive imaging and by measuring the spatially resolved spectral absorption of a thin structured titanium film.
© The Authors, published by EDP Sciences, 2019