Effect of silicon oxide coating on a silicon nitride focusing grating coupler efficiency
Moscow State Pedagogical University, 119991 Moscow, Russia
2 National Research University Higher School of Economics, 101000 Moscow, Russia
3 Zavoisky Physical-Technical Institute of the Russian Academy of Sciences, 420029 Kazan, Russia
* Corresponding author: email@example.com
Published online: 25 October 2019
The dependence of the efficiency of the focusing grating couplers on the period and filling factor before and after deposition of the upper silicon oxide layer was experimentally studied. The obtained data are of practical importance for tunable integrated-optical devices based on silicon nitride platform.
© The Authors, published by EDP Sciences, 2019
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