https://doi.org/10.1051/epjconf/202023801001
Laser processed semiconductors for integrated photonic devices -INVITED
1 Optoelectronics Research Centre, University of Southampton, Southampton, UK
2 School of Electronics and Computer Science, University of Southampton, Southampton, UK
* Corresponding author: acp@orc.soton.ac.uk
Published online: 20 August 2020
We report results of laser processing of amorphous silicon and silicon-germanium semiconductor materials for the production of integrated photonic platforms. As the materials are deposited and processed at low temperatures, they are flexible, low cost, and suitable for multi-layer integration with other photonic or electronic layers. We demonstrate the formation of waveguides via crystallization of pre-patterned silicon components and functional microstructures through crystallization and compositional tuning of silicon-germanium alloy films. These results open a route for the fabrication of high density, multi-functional integrated optoelectronic chips.
© The Authors, published by EDP Sciences, 2020
This is an Open Access article distributed under the terms of the Creative Commons Attribution License 4.0, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
