https://doi.org/10.1051/epjconf/202023803013
Optical coatings – precision engineering on non-flat surfaces
Laser Zentrum Hannover e.V. – Hollerithallee 8, 30419 Hannover, Germany
* Corresponding author: t.boentgen@lzh.de
Published online: 20 August 2020
Manufacturing of optical coatings is about the precise deposition of material and its control on the nanometer scale. This has to be achieved for a stack of multiple layers with a total thickness that can reach several micrometer. In addition, this has to be maintained for the complete functional area. In this contribution we demonstrate a process capable of delivering these accuracies not only to flat but also to curved surfaces.
© The Authors, published by EDP Sciences, 2020
This is an Open Access article distributed under the terms of the Creative Commons Attribution License 4.0, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
