https://doi.org/10.1051/epjconf/202023806003
Picometer mechanical displacement measurement using heterodyne interferometer with phase-locked loop
Department of Mechanical Engineering, Nagaoka University of Technology, 940-2188 Kamitomioka, Nagaoka, Niigata, Japan
* Corresponding author: masatoaa@vos.nagaokaut.ac.jp
Published online: 20 August 2020
In this paper, we show picometer-order mechnical displacmment measurements using a heterodyne interferometer with a phase-locked loop (PLL). A heterodyne light source for the interferometer is implemented with a frequency stabilized HeNe laser and two acousto-optic modulators. A real time phase measurement is performed by the PLL, whose software is programmed in a field-programmable gate array (FPGA). A stiff parallel spring stage combined with a high-voltage piezoelectric actuator is used to generate picometer-order mechanical motion. With the above implementations, mechanical displacement of 10 picometer or less can be measured.
© The Authors, published by EDP Sciences, 2020
This is an Open Access article distributed under the terms of the Creative Commons Attribution License 4.0, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
