Characterization progress of a UV-microscope recently implemented at the PTB Nanometer Comparator for uni- and bidirectional measurements
Physikalisch-Technische Bundesanstalt (PTB), Bundesallee 100, 38116 Braunschweig
* Corresponding author: email@example.com
Published online: 20 August 2020
In this contribution, we emphasize the need for a sophisticated characterization of measurement devices in particular for optical bidirectional measurements. As an example, the ongoing characterization of the UV-microscope at PTB’s linescale comparator is presented. First results of spectroscopic measurements of the employed UV-LED are presented and the impact of deviations in the center wavelength of the LED on the measurements are illustrated by rigorous simulations.
© The Authors, published by EDP Sciences, 2020
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