https://doi.org/10.1051/epjconf/202023812001
Transient Dynamical-Thermal-Optical System Modeling and Simulation
Institute of Engineering and Computational Mechanics, Pfaffenwaldring 9, 70569 Stuttgart, Germany
* e-mail: luzia.hahn@itm.uni-stuttgart.de
** e-mail: peter.eberhard@itm.uni-stuttgart.de
Published online: 20 August 2020
In this work, methods and procedures are investigated for the holistic simulation of the dynamicalthermal behavior of high-performance optics like lithography objectives. Flexible multibody systems in combination with model order reduction methods, finite element thermal analysis and optical system analyses are used for transient simulations of the dynamical-thermal behavior of optical systems at low computational cost.
© The Authors, published by EDP Sciences, 2020
This is an Open Access article distributed under the terms of the Creative Commons Attribution License 4.0, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
