https://doi.org/10.1051/epjconf/202226606007
Laser micromachining of diamond: A viable photonic and optofluidic platform
1 Istituto di Fotonica e Nanotecnologie IFN-CNR, Udr di Como, Via Valleggio 11, 22100 Como, Italy
2 Dipartimento di Scienza e Alta Tecnologia, Università dell’Insubria, Via Valleggio 11, 22100 Como, Italy
3 Istituto di Fotonica e Nanotecnologie IFN-CNR, Piazza Leonardo Da Vinci 32, 20133 Milano, Italy
4 Dipartimento di Fisica, Politecnico di Milano, Piazza Leonardo Da Vinci 32, 20133 Milano, Italy
* Corresponding author: ottavia.jedrkiewicz@ifn.cnr.it
Published online: 13 October 2022
We describe how the ultrafast laser micromachining technique applied with different writing methods can be used for the creation of various building blocks essential for the realization of a photonic and optofluidic diamond platform. Waveguides, NV centers, conductive wires, microchannels and microholes can be obtained thanks to laser microfabrication with suitable pulse parameters, making use not only of standard Gaussian laser beams but also of non-diffracting Bessel beams, the latter especially in all those cases where single pass high aspect-ratio microstructures or ablated areas are needed.
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