https://doi.org/10.1051/epjconf/202226610007
Nanoform evaluation approach using Mueller matrix microscopy and machine learning concepts
1 Physikalisch-Technische Bundesanstalt, Bundesallee 100, 38116 Braunschweig, Germany
2 Institut für Halbleitertechnik, Laboratory for Emerging Nanometrology, Technische Universität Braunschweig, Hans-Sommer-Str. 66, 38106 Braunschweig, Germany
* Corresponding author: tim.kaeseberg@ptb.de
Published online: 13 October 2022
We realized an imaging Mueller matrix microscope for nanostructure characterization. For investigations on nanoform characterization via Mueller matrix images, we measured and simulated Mueller matrix images of specially designed nanostructures. As an approach towards machine learning evaluation in imaging ellipsometry, we calculated Haar-like features of the images and observed a higher sensitivity to subwavelength features in off-diagonal matrix elements compared to microscopy.
© The Authors, published by EDP Sciences
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