https://doi.org/10.1051/epjconf/202226610023
Multi-beam Coherent Fourier Scatterometry
Optics Research Group, Imaging Physics Department, Faculty of Applied Sciences, Delft University of Technology, Lorentzweg 1, 2628 CJ Delft, The Netherlands
* Corresponding author: s.soman@tudelft.nl
Published online: 13 October 2022
Recent technological advancements in the past decades have been driven by the miniaturisation of devices using surfaces with nano-scale features. These advancements require fast, large area measurement techniques that can be used in process control to detect surface contaminations or to monitor fabrication quality. Here we present a modified version of the scanning coherent Fourier scatterometer with multiple beams that can be used to scan larger areas without increasing the scan time or decreasing the spatial resolution.
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