https://doi.org/10.1051/epjconf/202226613013
Micro-diffractive optical element arrays for beam shaping
Fachgebiet Technische Optik, Institut für Mikro- und Nanotechnologien, Technische Universität Ilmenau, Ilmenau, 98693, Germany
* e-mail: shima.gharbi-gebjagh@tu-ilmenau.de
Published online: 13 October 2022
We describe the design of Fourier type array generators and beam shapers as periodic configurations of refractive-diffractive optical elements in microscale to provide specific beam shaping and imaging functionaliies. We investigate how the addition of micro-nanostructures to regular microstructure arrays enables new degrees of freedom for the design of micro-optical systems, in combination with adapted fabrication techniques yields a better optical performance and leads to enhancement of the array concept, uniformity and efficiency.
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