https://doi.org/10.1051/epjconf/202227301011
Photoemission in microelectronic research: When technological developments allow to tackle new questions in the lab
Imec/MCACSA, Kapeldreef 75, 3001 Leuven, Belgium
Published online: 2 December 2022
Photoemission has always played an important role in the development of new microelectronic devices and processes and has quickly focused on the use of monochromatized Al Kd radiation in most commercial instruments. While, for instance, ARXPS using sample tilting or the use of high-energy photoemission at synchrotron facilities were available, their use remained confidential due to technical constraints such as measurement time, repeatability of the measurements and/or access to the facilities. In this paper, we show through some examples that the implementation of these features in a user-friendly setup in the laboratory considerably enhances the information retrieved from photoemission experiments.
© The Authors, published by EDP Sciences, 2022
This is an Open Access article distributed under the terms of the Creative Commons Attribution License 4.0, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
