https://doi.org/10.1051/epjconf/202328701001
Supercontinuum generation in ICP-CVD silicon-rich silicon nitride waveguides
Laboratoire Interdisciplinaire Carnot de Bourgogne, UMR 6303 CNRS Université de Bourgogne, 9 avenue Alain Savary, 21078 Dijon
* Corresponding author: ayesha.jayantha@u-bourgogne.fr
Published online: 18 October 2023
Inductively coupled plasma chemical vapor deposition was used to obtain thin films of siliconrich silicon nitride with a refractive index of 2.44 at optical telecommunications wavelength. The resulting layer was patterned into a 1.6 μm wide waveguide and tested for its nonlinear behavior using a 90-fs all-fiber laser centered at 1630 nm. A significant spectral broadening is demonstrated with a supercontinuum generation from 1300 nm to 1985 nm. Simulations are in fair agreement with the experiments, assuming a nonlinear index of 2 x 10-18 m2/W.
© The Authors, published by EDP Sciences, 2023
This is an Open Access article distributed under the terms of the Creative Commons Attribution License 4.0, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
