https://doi.org/10.1051/epjconf/202328704008
Robust method of metrology for direct phase measurement for nano-antennas
Université Paris-Saclay, ONERA, Optique et techniques associées, 91123, Palaiseau, France
* Corresponding author: cecile.le_gall@onera.fr
Published online: 18 October 2023
Optical metasurfaces allow the development of original and more and more complex optical functions. They are therefore facing a design and characterization problem. Indeed, they are more and more composed of complex patterns, with different types of antennas and non-periodic. This is why it is important to build libraries of nano-structures that can be used as building blocks to compose optical functions. Therefore, we propose a direct phase measurement metrology method for optical nanostructures. Using lateral shift interferometry, our technique allows to simultaneously characterize in amplitude and phase nano-antennas of all types, shapes and materials, and thus to experimentally establish a library of nano-antennas. Our method brings an additional tool in the design of nano-antennas, which completes the existing simulation tools, by allowing to test all types of nano-antennas.
© The Authors, published by EDP Sciences, 2023
This is an Open Access article distributed under the terms of the Creative Commons Attribution License 4.0, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
