https://doi.org/10.1051/epjconf/202328704035
Nanoimprinting for all-polymer electro-optic waveguide devices
1 Optical Nanomaterial Group, Institute for Quantum Electronics, Department of Physics, ETH Zurich, 8093 Zurich, Switzerland
2 Department of Chemistry, University of Washington, Seattle, Washington 98195-1700, USA
3 NLM Photonics, Seattle, Washington 98195, USA
* Corresponding author: fhenrique@ethz.ch
Published online: 18 October 2023
We performed the design and fabrication of polymer waveguide circuits, aiming for applications as electro-optic devices. Uniform waveguides with over one centimeter of length were fabricated by soft nanoimprint lithography. These multimode waveguides present a height of 3 µm and low surface roughness (2 nm), with a thin residual layer of 600 nm. Propagation losses at 1550 nm are estimated to be around 7 dB/cm.
© The Authors, published by EDP Sciences, 2023
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