https://doi.org/10.1051/epjconf/202328705007
Design and fabrication of a vanadium dioxide-based actively switchable wire grid polarizer for near-infrared applications
1 Friedrich Schiller University Jena, Institute of Applied Physics, Albert-Einstein-Str. 15, 07745 Jena, Germany
2 Fraunhofer Institute for Applied Optics and Precision Engineering IOF, Albert-Einstein-Str. 7, 07745 Jena, Germany
3 Munich University of Applied Sciences, Department of Applied Sciences and Mechatronics, Lothstr. 34, 80335 Munich, Germany
* Corresponding author: walther.markus@uni-jena.de
Published online: 18 October 2023
This study introduces an actively switchable wire grid polarizer exploiting the semiconductor-metal transition of vanadium dioxide. Operating at a near-infrared wavelength, the device features a SiO2 substrate with VO2 deposited by atomic layer deposition. We demonstrate the design using rigorous coupled wave analysis and show a viable fabrication route. Polarisation-resolved spectral transmission measurements show switching of the extinction ratio from 37.5 (on-state) to 1.6 (off-state). Despite observed deviations between measured and theoretical transmission values, the device shows potential in miniaturized imaging processes, polarization measurements, and ellipsometry.
© The Authors, published by EDP Sciences, 2023
This is an Open Access article distributed under the terms of the Creative Commons Attribution License 4.0, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
