https://doi.org/10.1051/epjconf/202328705027
Capability and limits of the technology of complex optical interference filters
Aix-Marseille Univ, CNRS, Centrale Marseille, Institut Fresnel, UMR 7249, 13013 Marseille, France
* Corresponding author: antonin.moreau@fresnel.fr
Published online: 18 October 2023
Over the last 15 years, there have been tremendous progress in the technology of optical interference filters. Nowadays, it is more and more common to fabricate optical interference filters that can combine several tens to several hundreds of layers in order to produce more and more complex optical functions. These progresses are the result of improved multilayer structures modeling and design procedures, the introduction of Virtual Deposition Process, and the development of performant physical vapor deposition machines associated with in-situ optical monitoring. In this paper, we will present actual state-of-the-art of these technologies and some typical examples of filters. We will then present some of the actual challenges and outlook in order to produce more and more performant optical components.
© The Authors, published by EDP Sciences, 2023
This is an Open Access article distributed under the terms of the Creative Commons Attribution License 4.0, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
