https://doi.org/10.1051/epjconf/202328708005
Advances on Percussion Drilling with Femtosecond Laser in GHz-burst Mode
1 Université Bordeaux, CNRS, CEA, CELIA, UMR5107, Talence, France
2 Amplitude, Cité de la Photonique, 11 Avenue de Canteranne, 33600 Pessac, France
3 Chester F. Carlson Center for Imaging Science, Rochester Institute of Technology, 54 Lomb Memorial Dr., Rochester, New York 14623, USA
* Corresponding author: pierre.balage@u-bordeaux.fr
Published online: 18 October 2023
Micromachining of various materials with femtosecond lasers operating in the GHz-burst regime has recently attracted great attention. In this contribution, we show our latest results on top-down percussion drilling in different dielectrics in this new operating regime. The dependence on the burst parameters such as burst repetition rate, number of pulses per burst, and burst energy are discussed. Moreover, we will focus on the influence of the burst shape on the drilling process. The quality of the drilled holes and their reachable dimensions are presented.
© The Authors, published by EDP Sciences, 2023
This is an Open Access article distributed under the terms of the Creative Commons Attribution License 4.0, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
