https://doi.org/10.1051/epjconf/202328714010
Thermo-optic phase shifter based on amorphous silicon carbide
1 Mediterranea University of Reggio Calabria, DIIES Dept., 89124 Reggio Calabria, Italy
2 Technical University of Denmark, DTU Electro, 2800 Lyngby, Denmark
3 Université Grenoble Alpes, CNRS, Grenoble INP, SIMaP, 38000 Grenoble, France
4 University of Naples Federico II, DIETI Dept., 80125 Naples, Italy
* Corresponding author: haou@dtu.dk
Published online: 18 October 2023
We report the preliminary experimental results for an amorphous silicon carbide (a-SiC) thermo-optic phase shifter (TOPS). This device is based on microring resonator (MRR) structure with a titanium (Ti) heater placed on the top of the device, separated by 1.5 μm thick SiO2 to reduce the optical loss. The proposed a-SiC microring has a thickness and a radius of 1.1 μm and 33 μm, respectively. By applying an electrical power in the Ti heater, a resonance wavelength shift at an optical wavelength of λ=1550 nm is shown, and the extracted thermal tunability is 52.2 pm/mW.
© The Authors, published by EDP Sciences, 2023
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