EPJ Web of Conferences 307, 02021 (2024)
https://doi.org/10.1051/epjconf/202430702021
https://doi.org/10.1051/epjconf/202430702021
Tuning refractive index change of SiNx induced by ultrafast laser pulses
Optoelectronics Research Centre, University of Southampton, Southampton, Hampshire SO17 1BJ, UK
* Corresponding author: g.shayeganrad@soton.ac.uk
Published online: 18 October 2024
We demonstrate the feasibility of femtosecond laser pulses to tune refractive index of SiNx, enabling direct writing waveguides in SiNx and reconfiguring microring resonators. The refractive index increases with pulse energy and pulse density.
© The Authors, published by EDP Sciences, 2024
This is an Open Access article distributed under the terms of the Creative Commons Attribution License 4.0, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
