https://doi.org/10.1051/epjconf/202430703001
High Average Power High-Harmonic EUV Sources and High Performance Imaging at the Nanoscale
1 Helmholtz Institute Jena, Fröbelstieg 3, 07743 Jena, Germany
2 GSI Helmholtzzentrum für Schwerionenforschung, Planckstraße 1, 64291 Darmstadt, Germany
3 Institute of Applied Physics, Abbe Center of Photonics, Friedrich-Schiller-University Jena, Albert-Einstein-Str. 15, 07745 Jena, Germany
4 Fraunhofer Institute for Applied Optics and Precision Engineering IOF, Albert-Einstein-Str. 7, 07745 Jena, Germany
* Author e-mail address: jan.rothhardt@uni-jena.de
Published online: 18 October 2024
We will report about the development of fiber-laser-driven high harmonic sources with output power currently exceeding 10 mW. This exceptional performance, combined with structured illumination approaches, enables nanoscale imaging and mapping of the chemical composition of semiconductor- and biological samples at the nanoscale.
© The Authors, published by EDP Sciences, 2024
This is an Open Access article distributed under the terms of the Creative Commons Attribution License 4.0, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
