https://doi.org/10.1051/epjconf/202430902010
Imaging Mueller matrix ellipsometry measurements on measuring fields in the micrometre range
Physikalisch-Technische Bundesanstalt (PTB), Bundesallee 100, 38116 Braunschweig, Germany
* e-mail: jana.grundmann@ptb.de
Published online: 31 October 2024
An imaging Mueller matrix ellipsometer is used to measure structures in measuring fields in the micrometre range, which are too small for conventional ellipsometry. Line and grid structures are measured and evaluated with the help of numerical simulations using the finite element method to characterize the structure parameters.
© The Authors, published by EDP Sciences, 2024
This is an Open Access article distributed under the terms of the Creative Commons Attribution License 4.0, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
