https://doi.org/10.1051/epjconf/202430903014
Laser-based fabrication chain enabling high quality mini aspheres
OST Eastern Switzerland University of Applied Sciences, Institute for Microtechnology and Photonics, 9471 Buchs, Switzerland
* Corresponding author: sven.laemmler@ost.chs
Published online: 31 October 2024
In recent years, 3D machining in glass for micro-components has seen a notable boost, notably with the development of a novel optical fabrication chain. This approach uses lasers for shaping and polishing, enabling the creation of complex mini-optics efficiently. The process begins with selective laser-induced etching (SLE) to define the optics’ outer shape and surface figure. Subsequent polishing, using a “one-shot laser polishing” technique, removes imperfections and reduces roughness in a single step, achieving optical-grade smoothness. This fabrication chain is applicable to mini-aspheres as well, enhancing their production efficiency. Additionally, it allows for wafer-level production, where multiple mini-optics are interconnected on a single glass substrate.
© The Authors, published by EDP Sciences, 2024
This is an Open Access article distributed under the terms of the Creative Commons Attribution License 4.0, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
