https://doi.org/10.1051/epjconf/202430906005
Epitaxial LiNbO3 growth and layer transfer for thin-film electro-optic modulator realization
1 Département Temps-Fréquence, FEMTO-ST, Besançon, France
2 R&I, Exail Photonics, Besançon, France
3 Annealsys, Montpellier, France
4 Institut Universitaire de France
* Corresponding author: gregoire.larger@exail.com
Published online: 31 October 2024
The aim of the PhD project is to develop a new trend in modulation system for Exail company: thin film (<1 μm) lithium niobate (LN) electro-optic modulator. It exhibits better performance in term of bandwidth, power consumption and footprint than legacy ones [1-3]. This PhD is a cooperation between Exail photonics which is world-renowned for the performances of their electro-optic modulators and FEMTO-ST institute which can offer the possibility to grow stoichiometric LN thin film by means of direct liquid injection metalorganic chemical vapor deposition (DLI-MOCVD). This cooperation opens the possibility to obtain industrialization of optical device based on CVD LN stoichiometric layers which allow to have enhanced performances such as higher electro-optic coefficient than that of congruent compositions of commercial single crystals. Thus, all steps from MOCVD layer deposition to modulator realization can be done here in Besançon.
© The Authors, published by EDP Sciences, 2024
This is an Open Access article distributed under the terms of the Creative Commons Attribution License 4.0, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
