https://doi.org/10.1051/epjconf/202532312003
Nanoscale Calibration Standards for On-Wafer S-Parameters measurements up to 110 GHz
1 LNE Laboratoire National de Métrologie et d’Essais, Trappes, France
2 Univ. Lille, CNRS, Centrale Lille, Univ. Polytechnique Hauts-de-France, UMR 8520 - IEMN - Institut d’Electronique de Microélectronique et de Nanotechnologie Lille, France
* Corresponding author: Daouda.Seck@lne.fr
Published online: 7 April 2025
We report the first experimental results on the design and fabrication of nanoscale on-wafer calibration standards operating up to 110 GHz. The propagation constant and effective permittivity of coplanar waveguide (CPW) transmission lines (TLs) are extracted from raw S-parameters using the Thru-Reflect-Line (TRL) method. Experimental data show deviations in extracted propagation characteristics when comparing nanostructures to microscale structures.
© The Authors, published by EDP Sciences, 2025
This is an Open Access article distributed under the terms of the Creative Commons Attribution License 4.0, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
