https://doi.org/10.1051/epjconf/20135914006
Effect of autoionizing states with a high-lying spectator electron on population inversion of nitrogen plasma in recombining phase
Tokyo Institute of Technology, Department of Energy Sciences, Nagatsuta 4259, Midori, Yokohama, Kanagawa, Japan
Published online: 15 November 2013
Discharge produced plasma (DPP) is a promising tool to generate effective extreme ultraviolet (EUV) light. A hydrogen-like nitrogen ion emits light at 13.4 nm with an optical allowed atomic transition from n = 3 to 2, where n stands for a principal quantum number. We focus on the properties of population inversion between n =3 and 2 in recombining phase. Population inversion is calculated in the framework of population kinetics, and a gain coefficient G is estimated. In this study, dielectronic-capture ladderlike (DL) processes are included. At high density and low temperature, the DL deexcitations make a large contribution to the population inversion.
© Owned by the authors, published by EDP Sciences, 2013
This is an Open Access article distributed under the terms of the Creative Commons Attribution License 2.0, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
