Optical emission spectroscopy for diagnosis of diamond growth and etching processes in microwave plasma

V.Yu. Yurov; E.V. Bushuev; A.P. Bolshakov; I.A. Antonova; V.G. Ralchenko; V.I. Konov

doi:10.1051/epjconf/201714902013

EPJ

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EPJ Web of Conferences 149, 02013 (2017)
https://doi.org/10.1051/epjconf/201714902013

Optical emission spectroscopy for diagnosis of diamond growth and etching processes in microwave plasma

V.Yu. Yurov¹^,2, E.V. Bushuev¹, A.P. Bolshakov¹^,2^,3, I.A. Antonova¹^,2, V.G. Ralchenko¹^,2^,3 and V.I. Konov¹^,2

¹ General Physics Institute RAS, Moscow 119991, Russia
² National Research Nuclear University MEPhI, Moscow 115409, Russia
³ Harbin Institute of Technology, 150001 Harbin, P.R. China

yurov6591@gmail.com

Published online: 4 August 2017

This article has no abstract.

© The Authors, published by EDP Sciences, 2017

This is an Open Access article distributed under the terms of the Creative Commons Attribution License 4.0, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.