Optical emission spectroscopy for diagnosis of diamond growth and etching processes in microwave plasma
1 General Physics Institute RAS, Moscow 119991, Russia
2 National Research Nuclear University MEPhI, Moscow 115409, Russia
3 Harbin Institute of Technology, 150001 Harbin, P.R. China
Published online: 4 August 2017
This article has no abstract.
© The Authors, published by EDP Sciences, 2017
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