Dependence of boron incorporation in delta layers on CVD diamond growth process and misorientation angle

M.A. Lobaev; A.M. Gorbachev; A.L. Vikharev; D.B. Radishev; V.A. Isaev; S.A. Bogdanov; P.A. Yunin; M.N. Drozdov; J.E. Butler

doi:10.1051/epjconf/201714902014

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EPJ Web of Conferences 149, 02014 (2017)
https://doi.org/10.1051/epjconf/201714902014

Dependence of boron incorporation in delta layers on CVD diamond growth process and misorientation angle

M.A. Lobaev¹, A.M. Gorbachev¹, A.L. Vikharev¹, D.B. Radishev¹, V.A. Isaev¹, S.A. Bogdanov¹, P.A. Yunin², M.N. Drozdov² and J.E. Butler¹

¹ Institute of Applied Physics of the Russian Academy of Sciences, Nizhny Novgorod, Russia
² Institute for Physics of Microstructures of the Russian Academy of Sciences, Nizhny Novgorod, Russia

Published online: 4 August 2017

This article has no abstract.

© The Authors, published by EDP Sciences, 2017

This is an Open Access article distributed under the terms of the Creative Commons Attribution License 4.0, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.