https://doi.org/10.1051/epjconf/202023305003
Magnetostriction in Amorphous Co66Fe34 Microcantilevers Fabricated with Hydrogenated Amorphous Silicon
1 IFIMUP-IN – Institute for Nanoscience and Nanotechnology, Rua do Campo Alegre, 4169-007, Porto, Portugal
2 INESC-TEC – Technology and Science, Rua do Campo Alegre, 4169-007, Porto, Portugal
3 INESC-MN – Microsystems and Nanotechnologies, Rua Alves Redol, 1000-029 Lisboa, Portugal
4 Department of Bioengineering, Instituto Superior Técnico, Universidade de Lisboa, 1049-001 Lisboa, Portugal
* Corresponding author: ampereira@fc.up.pt Phone: + 351 220402369 Fax: + 351 220402369
Published online: 16 April 2020
To study the magnetostriction of Co66Fe34 thin films, amorphous silicon microcantilevers were prepared by surface micromachining, and the 136 nm-thick magnetostrictive film was deposited by electron beam physical vapor deposition and patterned on top of the microcantilever structure. The magnetostriction of the Co66Fe34 films was confirmed by measuring the deflection of the cantilevers under a varying magnetic field, reaching displacements up to 8 nm. The configuration was simulated using COMSOL software, yielding a similar deflection behavior as a function of the magnetic field, with a film with a magneto strictive coefficient of λ S ~ 55 p.p.m. The experimental configuration uses a laser and a position sensitive detector to measure the displacement, based on an optical lever configuration, and a piezoelectric stage to calibrate the system.
Key words: Magnetostriction / Thin films / Micromechanical & nanomechanical oscillators / Functional Materials / Evaporation / Bending
© The Authors, published by EDP Sciences, 2020
This is an Open Access article distributed under the terms of the Creative Commons Attribution License 4.0, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
