https://doi.org/10.1051/epjconf/202226610013
Quasi-analytical and rigorous modeling of interference microscopy
Measurement Technology Group, Faculty of Electrical Engineering and Computer Science, University of Kassel, Wilhelmshöher Allee 71, Kassel 34121, Germany
* e-mail: tobias.pahl@uni-kassel.de
Published online: 13 October 2022
We present an extended vectorial Kirchhoff model of coherence scanning interferometry including several vector rotations occurring in the imagining and scattering process as well as polarization dependent reflection coefficients. For validation simulated results are compared to those of the conventional scalar Kirchhoff model and a rigorous finite element modeling.
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