https://doi.org/10.1051/epjconf/202226610014
Coherent Fourier scatterometry for particle detection on structured surfaces
Optics Research Group, Imaging Physics Department, Faculty of Applied Sciences, Delft University of Technology Lorentzweg , 2628 CJ Delft, The Netherlands
* Corresponding author: A.Paul-1@tudelft.nl
Published online: 13 October 2022
We demonstrate the detection of particles/contamination present on a structured surface using Coherent Fourier scatterometry (CFS) by applying Fourier filtering to the scanned maps, which eliminates background effects due to the electronic noise as well the structure itself. We show that by using filters in the Fourier space we can significantly improve the detection capabilities of the particles present on the structure.
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