https://doi.org/10.1051/epjconf/202328701003
Efficient single-etch surface grating couplers in silicon nitride platforms for telecom and datacom wavebands
1 Dept. Multimedia and Information-Communication Technologies, University of Žilina, 01026 Žilina, Slovakia
2 Dept. Electronics, Carleton University, ON K1S 5B6 Ottawa, Canada
3 Centre de Nanosciences et de Nanotechnologies, CNRS, Universite Paris-Saclay, 91120 Palaiseau, France
4 National Research Council Canada, ON K1A 0R6 Ottawa, Canada
5 University Science Park, University of Žilina, 01026 Žilina, Slovakia
* Corresponding author: daniel.benedikovic@uniza.sk
Published online: 18 October 2023
We present designs and experiments of single-etched amorphous silicon (α-Si) surface grating couplers on a silicon nitride (SiN) waveguide, operating at the telecom (C-band) and datacom (O-band) wavebands. SiN-only grating couplers demonstrate experimental coupling loss of -3.9 dB at 1.55 μm wavelength with a 1-dB bandwidth of 37 nm. Utilizing the hybrid α-Si/SiN platform with subwavelength grating structure, we obtain improved coupling performances, with the optimized fiber-chip coupling loss of -2.0 dB and a 1-dB spectral bandwidth of 42 nm centered at 1.31 μm.
© The Authors, published by EDP Sciences, 2023
This is an Open Access article distributed under the terms of the Creative Commons Attribution License 4.0, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
