https://doi.org/10.1051/epjconf/202328701005
Near-infrared photodetectors based on embedded graphene
1 Institute of Applied Science and Intelligent Systems "Eduardo Caianiello" (CNR), Via P. Castellino 111, 80131 Naples Italy
2 Institute for Microelectronics and Microsystems (CNR), Via Piero Gobetti, 101, 40129 Bologna, Italy
3 University of Campania "Luigi Vanvitelli", Department of Mathematics and Physics, Viale A. Lincoln, 5, 81100 Caserta Italy
* Corresponding author: teresa.crisci@na.isasi.cnr.it
Published online: 18 October 2023
In last years, the introduction of 2-dimensional materials such as graphene has revolutionized the world of silicon photonics. In this work, we demonstrate a new approach for integrating graphene into silicon-based photodetectors. We leverage a thin film of hydrogenated amorphous silicon to embed the graphene within two different photonic structures, an optical Fabry-Pérot microcavity, and a waveguide, achieving a stronger light-matter interaction. The investigated devices have shown promising performance resulting in responsivities as high as 27 mA/W and 0.15 A/W around 1550 nm, respectively.
© The Authors, published by EDP Sciences, 2023
This is an Open Access article distributed under the terms of the Creative Commons Attribution License 4.0, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
