https://doi.org/10.1051/epjconf/202430903023
Surface characterization in fabrication environments using angle resolved light scattering: From roughness and defect analysis to in-situ coating inspection
Fraunhofer Institute for Applied Optics and Precision Engineering IOF, Jena, Thuringia, Germany
* Corresponding author: anne-sophie.munser@iof.fraunhofer.de
Published online: 31 October 2024
The performance of an optical component or surface might quicky be limited by light scattering induced by the surface and coating roughness, as well as imperfections and contaminations. On the other hand, the scattered light contains valuable information about its source, which makes scattering based techniques powerful characterization tools for these important features. A major advantage is the fast, robust, and contact free measurement approach enabling even close-to process applications. Based on several examples we demonstrate the potential of light scattering characterization during the fabrication process up to even in-situ coating inspection.
© The Authors, published by EDP Sciences, 2024
This is an Open Access article distributed under the terms of the Creative Commons Attribution License 4.0, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
