https://doi.org/10.1051/epjconf/20135918005
Laser target using continuous supersonic jet in vacuum
1 Department of Energy Sciences, Tokyo Institute of Technology, Nagatsuta 4259, Midori-ku, Yokohama 226-8502, Japan
2 Yokohama Engineering Center, IHI Corporation, 1, Shin-nakaharacho, Isago-ku, Yokohama 235-8501, Japan
a e-mail: takahashi.k.ax@m.titech.ac.jp
Published online: 15 November 2013
For an extreme ultraviolet (EUV) light source, Sn plasmas, which can produce a strong radiation with high conversion efficiency at 13.5 nm, attract attention. The purpose of this study is to establish technology to form and recover a tin vapor supersonic jet in vacuum and to make clear the interaction between the supersonic free jet and an incident laser. In order to make the tin vapor, a tantalum crucible is inductively heated up and the radiation loss is compared with the input energy. We observe the shock waves in argon jet emitted from a supersonic nozzle by a Schlieren image. In the future, we will increase the number of shields and heat the tantalum crucible to the boiling point of tin. We are planning to make a study on the interaction process between laser and the free jet.
© Owned by the authors, published by EDP Sciences, 2013
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